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HEPA Filter

HEPA Filter

The standard HEPA, capturing 99.97% of 0.3㎛ particles. It is our highest-volume item for cleanroom final stages in LSI plants, cleanrooms and pharmaceutical labs, and its slim build keeps handling, installation and disposal simple. Sizes outside the table are made to order.

Efficiency 99.97% @0.3㎛

Used in

  • LSI fab
  • Pharmaceutical lab
  • Cleanroom final filter

Construction

MEDIA
MICRO GLASS FIBER
FRAME
ALUMINUM, STAINLESS STEEL
SEALANT
POLYURETHANE RESIN
GASKET
NEOPRENE RUBBER

Specifications

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Model Size (mm) Initial pressure drop (mmAq) Final pressure drop (mmAq) Air flow (CMM) Eff. (0.3㎛) Weight (kg)
BO-HP331 / -L 305×305×150 25.4 50 4 / 6 99.97%
BO-HP631 / -L 610×305×150 8 / 12 3.3
BO-HP661 / -L 610×610×150 18 / 28 6.5
BO-HP671 / -L 610×762×150 23 / 36 8.0
BO-HP691 / -L 610×915×150 28 / 45 9.5
BO-HP6121 / -L 610×1220×150 36 / 50 13.0
BO-HP332 / -L 305×305×292 7 / 10 5.0
BO-HP632 / -L 610×305×292 15 / 22 8.0
BO-HP662 / -L 610×610×292 32 / 50 13.0

Flow is listed as “standard / high-flow (-L)”; pressure loss is common to all models (initial 25.4, final 50). Custom sizes available.

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